One Of The High Level Alloys Aluminum Wire

A process method for multi-layer wiring aluminum interconnection, a through hole for aluminum wire interconnection and a semiconductor product, wherein the method comprises: tungsten back engraving on a wafer that has formed a tungsten plug in the contact hole, and removing the metal tungsten outside the contact hole; Described tungsten plug communicates lower layer of metal aluminum; Sputtering a conductive material layer on the surface of a tungsten back-engraved wafer; The upper layer of aluminum is routed on the surface of this conduction material layer. The structure of the aluminum wire interconnection vias includes: the lower metal aluminum, the tungsten plug, the metal titanium layer, and the upper metal aluminum. The step of adding the sputtering metal titanium layer after the tungsten back engraving step, due to the high step coverage rate of the conduction material layer such as the metal Ti layer, and the good adhesion between the tungsten plug and the upper layer of aluminum metal, improves the reliability of the upper and lower aluminum metal interconnection vias, effectively reduces the contact resistance of the upper and lower aluminum metals, and the on-resistance of the tungsten plug becomes more stable.

1.A kind of aluminum wire machine steel nozzle used for semi-automatic aluminum wire bonding machine, that is, the aluminum wire machine steel nozzle used with the wire pipe, wire duct, blade and blade limit push rod, when the wire bonding process is bonded, the aluminum wire machine steel nozzle directly rubs and extrudes the aluminum wire to the chip, converts the electrical energy into the energy of mechanical energy, and transmits it to the aluminum wire through the contact aluminum wire end on the steel nozzle of the aluminum wire machine, so that the aluminum wire and the chip are welded together at the intersection; Therefore, the steel nozzle has the characteristics of high bonding accuracy, strong wear resistance and ultra-smooth contact surface; At the same time, the steel nozzle has the characteristics of continuous welding of 200,000 welding joints for a long time without sticking to aluminum, so as to improve the production efficiency and prolong the service life.

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