High Level Material Silicon Metal 3303

Silicon and many metals on the periodic table can form metal silicides. In the past decade, due to the development and requirements of semiconductor science and technology, the research on silicon metal 3303 has been active. The basic structure of microelectronic devices (LSI, VLSI) contains a large number of metallization systems, such as the interconnection of devices and cells, silicon-to-metal contacts [Schottky barrier (SB) and ohmic contacts], and gate electrodes. IT IS ESTIMATED THAT EACH PIECE IS 256KMOS RA.

1.High-purity polysilicon, silicon metal 3303 is the main raw material of solar photovoltaic industry, the mainstream technology for the production of high-purity polysilicon at this stage is the Siemens method, but the production cost of this method remains high, so the exploration of low-cost high-purity polysilicon production technology has become one of the research hotspots at home and abroad. At present, the production technology of low-cost polysilicon is mainly physical method, including metallurgical method and heavy doped silicon waste purification method. The key to the production of solar-grade polysilicon by metallurgical method lies in boron removal. The process of blasting slag and boron removal was selected for exploratory experimental research, and the oxidation reaction between the reaction gas and the boron in the slag and silicon liquid was used to achieve the purpose of boron removal, and a new way to prepare high-purity polysilicon by metallurgical method was explored.

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